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Grant
Semiconductor Defect Inspection Simulation and Its UV Lens Module Performance Evaluation
Active
$435.8K Funding
3 People
External
Related Topics
semiconductors,
defect inspection,
simulation,
lens module,
uv performance
People
Heejoo Choi
Co-Investigator (COI)
James C Wyant Coll Optical Sci
﹒Associate Research Professor
Young Kim
Principal Investigator (PI)
James C Wyant Coll Optical Sci
﹒Assistant Research Professor
Daewook Kim
Co-Investigator (COI)
James C Wyant Coll Optical Sci
﹒Associate Professor
